Serving the
Industry since 1985
  BUBBLER CYLINDER - PRODUCT DESCRIPTION

Metalorganics are chemicals required in semiconductor manufacturing processes including vapor phase epitaxy and other chemical deposition equipment. Metalorganics are supplied in Precision Fabricators' high integrity/purity "bubblers".Bubblers are used to fill, ship, and dispense saturated gases and other materials by delivering a gas through the inlet valve and "bubbling" it through a liquid or solid in the cylinder.



  Sizes Available as Standard:  
  • 200cc   450cc   900cc   1300cc   2500cc
    Specification:  
  • DOT ( Department of Transportation )- 48
    Design      
  • 260 psig/full vacuum @ ambient temperature  
  • Leak test @ 520 psig
    Material of Construction:      
  • All wetted parts are TP 316L Stainless Steel
    Finish:      
  • All interior surfaces are 20 ra and electro-polished  
  • Exterior surfaces are mechanically polished
    Fittings:      
  • One (1) fill port consisting of a male VCR Fitting  
  • One (1) INLET valve with dip tube and male VCR end  
  • One (1) OUTLET valve w/o tip tube and male VCR end
    Valves:      
  • Parker Hannifin®  
  • NUPRO®  
  • GASFLO®




    • Valve Specifications:  
  • Diaphragm "packless" valves  
  • Pressure rating: 3000 psig  
  • Flow coefficient: cv = .26  
  • Seat orifice size: .125" Diameter  
  • Seat Material: KEL - F (PCTFE)  
  • Temperature Limits:
        Complete Assembly: -65 degrees F to 150 degrees F
        Assembly less handle: -100 degrees F to 250 degrees F
        Bake out in open position: up to 350 degrees F      
  • Maximum allowable seat & inboard leakage: 2 x 10 - 8 atm cc/sec He  
  • Wetted surfaces: 316L Stainless steel, KEL-F(PCTFE)
    Configurations:      
  • Vertical and horizontal, with and without fill ports  
  • Custom configurations available on request
    •  

       Home   Printable Version ( PDF format )

      Precision Fabricators Ltd.
    171 Tosca Drive
    Stoughton, MA 02072 USA    		 Telephone:
    (781) 341-7242    		 Fax:
    (781) 341-7245    		 E-mail:
     mailstop@precisionfab.net    		 Web:
     www.precisionfab.net