Metal-Organic Precursors

(Examples of chemicals previously used with Precision Fabricators' Bubblers)

Aluminium

Trimethylaluminium (TMA or TMAl), Liquid

Triethylaluminium (TEA or TEAl), Liquid

Gallium

Trimethylgallium (TMG or TMGa), Liquid

Triethylgallium (TEG or TEGa), Liquid

Indium

Trimethylindium (TMI or TMIn), Solid

Di-isopropylmethylindium (DIPMeIn), Liquid

Ethyldimethylindium (EDMIn), Liquid

Germanium

Isobutylgermane (IBGe), Liquid

Arsenic

Arsine AsH3, Gas

Tertiarybutyl arsine (TBAs), Liquid

Monoethyl arsine (MEAs), Liquid

Trimethyl arsine (TMAs), Liquid

Antimony

Trimethyl antimony (TMSb), Liquid

Triethyl antimony (TESb), Liquid

Tri-isopropyl antimony (TIPSb), Liquid

Stibine SbH3, Gas

Cadmium

Dimethyl cadmium (DMCd), Liquid

Diethyl cadmium (DECd), Liquid

Dimethylamino germanium trichloride (DiMAGeC), Liquid

Tetramethylgermane (TMGe), Liquid

Tetraethylgermane (TEGe), Liquid

Nitrogen

Phenyl hydrazine, Liquid

Dimethylhydrazine (DMHy), Liquid

Tertiarybutylamine (TBAm), Liquid

Ammonia NH3, Gas

Phosphorus

Phosphine PH3, Gas

Tertiarybutyl phosphine (TBP), Liquid

Bisphosphinoethane (BPE), Liquid

Methyl Allyl Cadmium (MACd), Liquid

Tellurium

Dimethyl telluride (DMTe), Liquid

Diethyl telluride (DETe), Liquid

Di-isopropyl telluride (DIPTe), Liquid

Selenium

Dimethyl selenide (DMSe), Liquid

Diethyl selenide (DESe), Liquid

Di-isopropyl selenide (DIPSe), Liquid

Zinc

Dimethylzinc (DMZ), Liquid

Diethylzinc (DEZ), Liquid