CVD Precursor Categories

Aluminium

Halides - TiCl4, TaCl5, WF6, etc

Hydrides - SiH4, GeH4, AlH3(NMe3)2, NH3, etc

Metal Organic Compounds

Metal Alkyls - AlMe3, Ti(CH2tBu)4, etc

Metal Alkoxides - Ti(OiPr)4, etc

Metal Dialylamides - Ti(NMe2)4, etc

Metal Diketonates - Cu(acac)2, etc

Metal Carbonyls - Ni(CO)4, etc